High Density Plasma Vapor Deposition

Award Information

Agency: National Science Foundation	Branch: N/A	Award ID: 21775	Program Year/Program: 1993 / SBIR
Agency Tracking Number: 21775	Solicitation Year: N/A	Solicitation Topic Code: N/A	Solicitation Number: N/A

Small Business Information: Applied Science And Technology
35 Cabot Road Woburn, MA 01801
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Woman-Owned: No

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Phase 1: Fiscal Year: 1993

Title: High Density Plasma Vapor Deposition

Agency: NSF

Contract: N/A

Award Amount: $50,000.00

Abstract:
N/A

Principal Investigator:
Ih-houng Loh
5086637652

Business Contact:

Small Business Information at Submission:

ASTex
35 Cabot Road Woburn, MA 01801

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DUNS: N/A

Number of Employees: N/A

Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No