Chemical Analyzer System for In Situ and Real Time Surface Monitoring for Composition Control During Synthesis of Compound Semiconductor Films

The overall objective of this proposal is to evaluate the new in-situ growth monitoring system, Auger Probe, in an MBE environment for reliable and reproducible, highly precise results. State-of-the art data manipulation techniques will be used without impacting the growth process (MBE in this case). Using Auger Electron Spectrometry (AES), the Probe system will be used for in situ, real time analysis and control of surface elemental compositions during MBE growth of compound semiconductor materials. Demonstrations will be performed on III-V compounds [such as (Al,In,Ga)(As,Sb)], but the methods will be developed in such a way that they could be adapted to other materials systems.