LOW LOSS MILLIMETER-WAVE SEMICONDUCTOR WAFER PROBES

Award Information

Agency: Department of Defense

Branch: Army

Contract: N/A

Agency Tracking Number: 5621

Amount: $57,489.00

Phase: Phase I

Program: SBIR

Solicitation Topic Code: N/A

Solicitation Number: N/A

Timeline

Solicitation Year: N/A

Award Year: 1987

Award Start Date (Proposal Award Date): N/A

Award End Date (Contract End Date): N/A

Small Business Information

Cascade Microtech, Inc.

14155 Sw Brigadoon Ct - Ste B

Beaverton, OR 97005

United States

DUNS: N/A

HUBZone Owned: No

Woman Owned: No

Socially and Economically Disadvantaged: No

Principal Investigator

Name: KEITH JONES
Phone: (503) 626-8245

Business Contact

Phone: () -

Research Institution

N/A

Abstract

MAKING ACCURATE AUTOMATED ON-WAFER MEASUREMENTS OF MILLIMETER-WAVE SEMICONDUCTOR DEVICES AND CIRCUIT ELEMENTS IS A FUNDAMENTAL REQUIREMENT FOR THE ADVANCEMENT OF A MILLIMETER-WAVE TECHNOLOGY. MILLIMETER-WAVE WAFER PROBE DEVELOPMENT IS REQUIRED. PRESENTLY ON-WAFER PROBING IS AVAILABLE ONLY TO 26.5 GHZ. HOWEVER, SIGNIFICANT INNOVATIONS ARE REQUIRED TO EXTEND THIS CAPABILITY OF HIGHER FREQUENCIES. THIS WORK INVESTIGATES THE FEASIBILITY OF OVERCOMING WAFER PROBE INSERTION LOSS PROBLEMS IN THE MILLIMETER-WAVE BANDS. PHASE I RESULTS IN PROTOTYPES OF DC TO 50 GHZ WAFER PROBES WITH LESS THAN 2 DB INSERTION LOSS FOR THE MEASUREMENT OF ACTIVE MILLIMETER-WAVE DEVICES ON-WAFER. THESE RESULTS WILL PROVIDE A BASIS FOR MILLIMETER-WAVE NOISE FIGURE AND DYNAMIC RANGE MEASUREMENTS IN LATER WORK.

* Information listed above is at the time of submission. *

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LOW LOSS MILLIMETER-WAVE SEMICONDUCTOR WAFER PROBES