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Protective coating for microelectromechanical systems (MEMS)

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: DASG60-02-P-0145
Agency Tracking Number: 02-0556
Amount: $68,673.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 2002
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
9 Linnell Circle
Billerica, MA 01821
United States
DUNS: 611655440
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Mario Cazeca
 Manager, R & D
 (978) 663-7652
Business Contact
 Dianne Cazeca
Title: Program Administrator
Phone: (978) 663-7652
Research Institution

"Microelectromechanical systems (MEMS) devices, though built using semiconductor equipment, have a different set of failure mechanisms and reliability concerns than integrated circuits. One major concern is stiction, a term that describes the propensity oftwo silicon surfaces to stick to each other if they touch.To solve this problem, AST is proposing to develop organic coatings with Teflon-like characteristics and a high degree of conformality. The proposed film will be around 200 ¿ thick, uniform over a 12 inch diameter circle, and pinhole free. AST will usedifferent technologies such as Chemical Vapor Deposition (CVD) and Plasma Enhanced Chemical Vapor Deposition (PECVD) to develop robust and durable coating processes for MEMS devices. One method that will be used is the deposition of parylene by the CVDtechnique, with simultaneous fluorination of the deposited film. Another deposition method will be PECVD. The precursor materials for this process will be fluorinated gases such as tetra-fluoro-ethylene or other gases that contain fluorine. Differentfluorinated gases will be tested during the Phase I program in order to optimize thin film characteristics. AST has experience with both methods of deposition, which are used in our commercial products. A thin, uniform, and pinhole free film with Teflon-like properties will very useful for the MEMS industry, and any other industry or government agencies that need a conformal, hyd

* Information listed above is at the time of submission. *

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