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SBIR Phase I: Process-Control Instrument for Multi-Chamber Platforms

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9661652
Agency Tracking Number: 35633
Amount: $74,884.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1997
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
12 Michigan Drive
Natick, MA 01760
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Matthew Banet
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract

N/A

* Information listed above is at the time of submission. *

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