In-Situ Solid State Laser Spectroscopic Monitor for Real-Time Molecular Beam Epitaxy Process Control

Foster-Miller, Inc. (FMI) in association with Schwartz Electro Optics, Inc. (SEO) proposes to develop a novel in-situ real-time sensor for monitoring Molecular Beam Epitaxy (MBE) growth processes. These sensors will be based on laser induced atomic fluorescence, which is the method of choice for trace analysis of atomic species in the low pressure MBE environment. The enabling technology is the development of one of the first continuously tunable solid-state laser source in the UV which can be tuned to excite most atoms involved in the MBE growth efforts from the ground state. FMI with its expertise in spectroscopy and light delivery systems in combination with SEO's solid state laser technology will fabricate a system for in-situ diagnostics of molecular beams and crystal surfaces for real-time control of MBE processes. The Phase I emphasis will be to demonstrate the underlying spectroscopy of the atomic and molecular species involved in MBE processes. A vapor cell containing group III-V elements will be fabricated to demonstrate proof-of-concept. It is our intent to demonstrate that fluorescence spectral data will provide real-time control parameters for MBE processes. The data obtained during Phase I will lead to the design of a prototype system to be tested on an MBE process reactor during Phase II. Phase III commercialization of the in-situ monitor will be accomplished by Foster-Miller's commercial sensor subsidiary, Sensiv, Inc., in collaboration with Schwartz Electro Optics, a leading developer and manufacturer of tunable solid state lasers.