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ULTRA-HIGH SENSITIVITY INTEGRATED HYDROPHONE SENSOR: USING LOW-COST SILICON MICROMACHINED ELEMENTS

Award Information
Agency: Department of Defense
Branch: Navy
Contract: N/A
Agency Tracking Number: 15456
Amount: $419,388.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1993
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
4001 N Ninth Street Suite 15
Arlington, VA 22203
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Dr Philip Mauger
 Principal Investigator
 (703) 525-0001
Business Contact
Phone: () -
Research Institution
N/A
Abstract

HORIZON TECHNOLOGY GROUP, INC. AND NANOSTRUCTURES, INC ("HTG/N") PROPOSE TO MICROMACHINE AND TEST LOW-COST CAPACLTIVE HYDROPHONE SENSORSFROM SINGLE-CRYSTAL SILICON. THESE SENSORS, TOGETHER WITH A PRE-AMP, A/D CONVERTER, AND SERIAL INTERFACE, CAN BE INTEGRATED INTO A MINIATURE LOW-POWER PACKAGE. A CONCEPTUAL DESIGN WILL BE MADE FOR A WATERPROOF PACKAGE AND SIMPLE LIGHT-WEIGHT ELECTRICAL OR FIBER-OPTIC CABLING, FOR LARGE ACOUSTIC ARRAYS. THE UNIQUE CONSTRUCTION OF THE CAPACITIVE SENSOR ALLOWS IT TO BE FLUID FILLED TO ACCOMODATE HIGH STATIC PRESSURES AND EXPLOSIVE SHOCK. TESTING WILL DEMONSTRATE THESE SENSORSHAVE THIRTY DB MORE SENSITIVITY AND DYNAMIC RANGE THAN CONVENTIONAL PIEZOELECTRIC HYDROPHONES OVER THE AUDIO FREQUENCY RANGE. ANALYSIS WILL BE PERFORMED TO SHOW THE COST TO FABRICATE, TEST, AND CALIBRATE THE SENSORS IS LOW BECAUSE OF HTG/N-S PROPRIETARY DESIGN AND PATENTEDSILICON MICROMACHINING TECHNOLOGY. MAJOR COST SAVINGS ARE EXPECTED FOR LARGE ACOUSTIC ARRAYS AT BOTH THE COMPONENT AND SYSTEM LEVELS. THE SENSOR-S LONG-TERM STABILITY AND VERY LOW SENSITIVITY TO OCEAN TEMPERATURE AND PRESSURE WILL BE DEMONSTRATED. FOR ULTRA HIGH-SENSITIVITY RESEARCH APPLICATIONS, A SENSOR ARRAY CAN BE HOUSED IN ONE PACKAGE, THE OUTPUTS AVERAGED, OR RESONANT TUNED CIRCUITS USED TO ENHANCE S/N AND EXTEND DYNAMIC RANGE.

* Information listed above is at the time of submission. *

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