Graphene Production Tool

In this STTR program, Structured Materials Industries, Inc. (SMI) and Cornell University are developing a flexible graphene film deposition system, for both research and production applications. In Phase I, our team demonstrated technical feasibility of scaling existing graphene process technology at Cornell to large wafer sizes. We demonstrated high quality graphene films by both silicon sublimation and chemical vapor deposition (CVD) processes. Also in Phase I, SMI designed a beta prototype of the graphene production tool, to be built in Phase II. In Phase II, SMI will build and demonstrate the beta prototype graphene production tool. Cornell will further develop material processes and characterization technologies. We will demonstrate high quality graphene films by both CVD and silicon sublimation at large area, as well as overall low cost of ownership. We will work with a wide range of collaborators to demonstrate the properties and applications of graphene, for both defense and commercial markets. In the later stage of Phase II, we will establish the beta graphene production tool as a user facility. The operational beta prototype graphene tool will serve as a demonstration and pilot production facility for graphene materials and graphene based devices, into Phase III and beyond. BENEFIT: The recent discovery of graphene has sparked intense research, both from scientific interest in the material to technological interest in building graphene based nanodevices. Graphene has many unique properties which can be exploited for novel device applications. These properties include very high electron mobility, high thermal conductivity, high elastic modulus and a quantum Hall effect. Presently, a critical need exists for reliable and reproducible production tools for graphene film synthesis. This STTR program will develop a graphene tool platform which is scalable from initial research to ultimate high volume production, for smooth transition of graphene technical developments to the marketplace.