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Metrology of thin films on sapphire substrate

Award Information
Agency: Department of Defense
Branch: Defense Microelectronics Activity
Contract: HQ072717P0030
Agency Tracking Number: E16B-001-0019
Amount: $149,973.53
Phase: Phase I
Program: STTR
Solicitation Topic Code: DMEA16B-001
Solicitation Number: 2016.0
Timeline
Solicitation Year: 2016
Award Year: 2017
Award Start Date (Proposal Award Date): 2017-09-28
Award End Date (Contract End Date): 2018-04-10
Small Business Information
15 Presidential Way
15 Presidential Way, MA 01801
United States
DUNS: 080115461
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Dr. Jung Yoon
 Vice President of Research
 (781) 935-1200
 JYoon@Agiltron.com
Business Contact
 JEANNE HLADKY
Phone: (781) 935-1200
Email: JHladky@Agiltron.com
Research Institution
 MIT Lincoln Laboratory
 Erik Woisin
 
244 Wood Street
Lexington, MA 02420
United States

 (781) 981-7806
 Federally funded R&D center (FFRDC)
Abstract

There is a lack of non-destructive metrology tool to measure the thickness of thin films on sapphire substrate due to the transparency of the

* Information listed above is at the time of submission. *

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