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Metrology of thin films on sapphire substrate
Award Information
Agency: Department of Defense
Branch: Defense Microelectronics Activity
Contract: HQ072717P0030
Agency Tracking Number: E16B-001-0019
Amount:
$149,973.53
Phase:
Phase I
Program:
STTR
Solicitation Topic Code:
DMEA16B-001
Solicitation Number:
2016.0
Timeline
Solicitation Year:
2016
Award Year:
2017
Award Start Date (Proposal Award Date):
2017-09-28
Award End Date (Contract End Date):
2018-04-10
Small Business Information
15 Presidential Way
15 Presidential Way, MA
01801
United States
DUNS:
080115461
HUBZone Owned:
No
Woman Owned:
No
Socially and Economically Disadvantaged:
No
Principal Investigator
Name: Dr. Jung Yoon
Title: Vice President of Research
Phone: (781) 935-1200
Email: JYoon@Agiltron.com
Title: Vice President of Research
Phone: (781) 935-1200
Email: JYoon@Agiltron.com
Business Contact
Name: JEANNE HLADKY
Phone: (781) 935-1200
Email: JHladky@Agiltron.com
Phone: (781) 935-1200
Email: JHladky@Agiltron.com
Research Institution
Name: MIT Lincoln Laboratory
Contact: Erik Woisin
Address:
Phone: (781) 981-7806
Type: Federally Funded R&D Center (FFRDC)
Contact: Erik Woisin
Address:
244 Wood Street
Lexington, MA
02420
United States
Phone: (781) 981-7806
Type: Federally Funded R&D Center (FFRDC)
Abstract
There is a lack of non-destructive metrology tool to measure the thickness of thin films on sapphire substrate due to the transparency of the
* Information listed above is at the time of submission. *
