High-Quality AlGaN Substrates for Optical and Electronic Applications

Kyma Technologies, the leading domestic supplier of crystalline III-N substrate materials, is teamed with leading AlGaN materials & device experts at Sandia National Laboratory, to develop high-quality AlGaN templates in Phase I and free-standing AlGaN substrates in Phase II. Understanding that the commercialization potential of AlGaN templates and substrates requires a cost-effective and diameter-scalable approach, the team will apply Kymas high-rate HVPE process to a newly developed, highly-engineered, cost-effective, epi-ready substrate that is thermal expansion matched to AlGaN, setting the stage for rapid success in Phase I and providing great potential for being extended to create a free-standing AlGaN substrate manufacturing process in Phase II. Sandia scientists will assess the quality of the materials produced and give important feedback to Kymas crystal growth effort, targeting low defect density, high structural quality materials with relatively flat atomic lattices and uniform group III cation distributions that are free of surface segregation and spinodal decomposition effects. The commercialization strategy includes the marketing of both the AlGaN materials and the tools and processes for making them and supports rapid diameter expansion to 150mm and beyond.