MEMS based thermopile infrared detector array for chemical and biological sensing

Thermopile arrays manufactured using integrated process compatible materials and micro-machining will provide high performance with low manufacturing cost. Black Forest Engineering (BFE) teamed with Case Western Reserve University will design thermopiles using silicon based semiconductors and compare performance. Low cost thermopiles, differentially coupled with advanced BFE CMOS readout, will provide DOD with rugged, inexpensive, and high performance infrared sensing capabilities. Si (poly and single crystal) and SiC (poly) thermopiles will be designed and performance compared on the Phase I effort for fabrication of linear arrays applicable for infrared chemical and biological sensing missions. On Phase II the thermopile detector linear array will be fabricated and integrated with a BFE readout ASIC. The Phase II sensor will meet future ARMY sensing needs such as Bio-Aerosol Threat Alert.