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MEMS based thermopile infrared detector array for chemical and biological sensing

Award Information
Agency: Department of Defense
Branch: Army
Contract: W911NF-10-C-0121
Agency Tracking Number: A10A-004-0430
Amount: $99,965.00
Phase: Phase I
Program: STTR
Solicitation Topic Code: A10A-T004
Solicitation Number: 2010.A
Solicitation Year: 2010
Award Year: 2010
Award Start Date (Proposal Award Date): 2010-09-23
Award End Date (Contract End Date): 2011-03-22
Small Business Information
12930 Morris Trail
Colorado Springs, CO 80908
United States
DUNS: 621633296
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Stephen Gaalema
 (719) 593-9501
Business Contact
 Vivian McDonald
Title: Office Administrator
Phone: (719) 593-9501
Research Institution
 Case Western Reserve University
 Derek M Humphrey
Office of Sponsored Projects 10900 Euclid Avenue
Cleveland, OH 44106
United States

 (216) 368-4510
 Nonprofit College or University

Thermopile arrays manufactured using integrated process compatible materials and micro-machining will provide high performance with low manufacturing cost. Black Forest Engineering (BFE) teamed with Case Western Reserve University will design thermopiles using silicon based semiconductors and compare performance. Low cost thermopiles, differentially coupled with advanced BFE CMOS readout, will provide DOD with rugged, inexpensive, and high performance infrared sensing capabilities. Si (poly and single crystal) and SiC (poly) thermopiles will be designed and performance compared on the Phase I effort for fabrication of linear arrays applicable for infrared chemical and biological sensing missions. On Phase II the thermopile detector linear array will be fabricated and integrated with a BFE readout ASIC. The Phase II sensor will meet future ARMY sensing needs such as Bio-Aerosol Threat Alert.

* Information listed above is at the time of submission. *

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