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Electron Microscopy for Mobile Laboratory Systems

Award Information
Agency: Department of Defense
Branch: Office for Chemical and Biological Defense
Contract: DAAD13-03-C-0056
Agency Tracking Number: C031-0146
Amount: $69,989.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 2003
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
62 Buckingham Drive
Moraga, CA 94556
United States
DUNS: 125941414
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Lawrence Muray
 (925) 708-3584
Business Contact
 James Spallas
Title: Chief Technical Officer
Phone: (925) 699-9680
Research Institution

NOVELX, Inc. proposes to develop and market a compact scanning electron microscope (SEM) with X-ray analysis capabilities for mobile, homeland defense, commercial, and military applications. The Phase I technical objective is to investigate the feasibilityof integrating a miniature modular scanning electron microscope (mmSEM) with a thermoelectrically cooled silicon X-ray detector, in order to produce a truly low-cost, low-power, portable, liquid nitrogen-free analysis system. The mmSEM will nominallyoperate in two modes: high resolution imaging mode at 1keV with <25nm image resolution, and high voltage X-ray analysis mode, with <175eV energy resolution at 5.9 keV (Mn-K).Several novel technologies and innovations will be incorporated into the NOVELX analytic mmSEM. The column will consist of all electrostatic, micromachined, batch-fabricated silicon components using micro-electromechanical systems (MEMS) technologies.Batch processing will drive the component costs down while MEMS micromachining and silicon technologies guarantee that the dimensions of the components will be delivered precisely as designed. The silicon components will be packaged using advancedintegrated ceramic technologies. The miniature column will be mated with one of several commercially available

* Information listed above is at the time of submission. *

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