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Characterization of Metastable Beam Sources

Award Information
Agency: Department of Commerce
Branch: N/A
Contract: N/A
Agency Tracking Number: 37772
Amount: $49,989.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 1997
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
20 New England Business Center
Andover, MA 01810
United States
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Lawrence G. Piper
 () -
Business Contact
Phone: (508) 689-0003
Research Institution

We propose a 6 month program during which we will develop and demonstrate an approach for generating well-characterized atomic and molecular beams of metastable species. Such beam sources are necessary for the microelectronics and plasma processing industries because they would provide a valuable tool required to establish a solid database of plasma-related collision processes. This improved and expanded database would allow accurate plasma-processing models which are needed to optimize plasma processing procedures. We think the major problem to address is not how go generate beams of atomic and molecular metastables, but how to characterize such beams accurately. We will generate metastables in a system which allows easy and accurate characterization, a discharge-flow reactor. We will then expand a sample of this well-characterized mix of metastables through a nozzle into a high vacuum system. We propose an innovative and sensitive detection technique called tracer fluorescence, to characterize the metastable concentrations in the molecular beam. Finally, we will demonstrate that the relatively simple diagnostics in the moderate pressure source relate directly to the concentrations of metastables in the molecular beam.

* Information listed above is at the time of submission. *

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