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Award Information
Agency: Department of Commerce
Branch: N/A
Contract: SB1341-02-C-0018
Agency Tracking Number: 8.11.08
Amount: $0.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Solicitation Year: N/A
Award Year: 2001
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
30 Corporate Circle
Albany, NY 12203
United States
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Ning Gao
 Research Scientist
 (518) 464-3334
Business Contact
 Ning Gao
Title: Principal Investigator
Phone: (518) 464-3334
Research Institution

This SBIR Phase II project will significantly improve the quality of elemental analysis in SEMS under partial pressure conditions by using a polycapillary x-ray optic in front of the energy dispersive spectrometer (EDS) in low-vacuum scanning electron microscopes (LV-SEM) or environmental SEMs (ESEM). LV-SEMS and ESEMs are designed to work at elevated sample chamber pressures to allow analysis of nonconductive or moist specimens. An undesirable consequence results from the broadening electron beam due to the presence of the gas. This degrades the elemental-detection sensitivity, because the fluorescent x rays generated far from the center of the electron probe create high background. It also greatly reduces spatial resolution for elemental mapping. The Phase I results have successfully demonstrated the feasibility of the proposed approach. In the Phase II, a fully-functional prototype polycapillary optic-based EDS will be built and demonstrated in a commercial LV-SEM system. This will include an optimized polycapillary x-ray optic with a large collecting angle, optic detector mounting, detector-SEM mounting which provides fine alignment, an operating procedure, and examples of application data. The team involved world leaders in developing and commercially providing x-ray optics and EDS systems.

* Information listed above is at the time of submission. *

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