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Flexible Gas Diffusion Barriers Using ALD/MLD Multilayers and Roll-to-Roll Processing

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: D11PC20172
Agency Tracking Number: 10SB1-0003
Amount: $750,000.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: SB101-001
Solicitation Number: 2010.1
Solicitation Year: 2010
Award Year: 2011
Award Start Date (Proposal Award Date): 2011-07-01
Award End Date (Contract End Date): N/A
Small Business Information
580 Burbank St., Unit 100
Broomfield, CO -
United States
DUNS: 011125734
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Markus Groner
 Senior Research Scientist
 (303) 318-4146
Business Contact
 Robert Morgan
Title: CFO
Phone: (303) 318-4145
Research Institution

ALD NanoSolutions, Inc. is developing flexible gas diffusion barriers to enable FOLEDs, thin film photovoltaics and other devices to be fabricated on polymer substrates in a novel roll-to-roll ALD process. Multilayer barriers films consisting of nanometer thick inorganic and organic layers can be fabricated using atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. By interspersing the already excellent nanometer thick Al2O3 ALD barrier films with thin, flexible polymeric MLD layers, we can create flexible ultrabarriers. The very low water vapor transmission rates (WVTR) of these ALD/MLD film will be tested using our improved Calcium test. Flexibility of these ALD/MLD multilayer films will be characterized using advanced cracking detection methods and optimized using modeling of the strains in multilayer film stacks. Meeting the aggressive Phase II targets of<1x10-6 g/m2/day WVTR and 5% strain requires a combination of a thorough understanding of the mechanics of a multilayer films, the precise control afforded by ALD/MLD techniques, and advanced testing and characterization methods. Commercialization of these ALD/MLD ultrabarriers will be developed in pilot scale roll-to-roll ALD processing. Using our initial proof-of-concept work, we will build a continuous, multi-cycle, atmospheric ALD deposition head to pioneer ALD on a moving flexible web substrate.

* Information listed above is at the time of submission. *

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