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Award Data

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The Award database is continually updated throughout the year. As a result, data for FY20 is not expected to be complete until September, 2021.

  1. Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications

    SBC: STRUCTURED MATERIALS INDUSTRIES, INC.            Topic: A12aT020

    In this STTR program, Structured Materials Industries, Inc. (SMI) and partners will develop hardware and process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. ...

    STTR Phase II 2014 Department of DefenseArmy
  2. Autonomous Broad Spectrum Environmental Sentinels

    SBC: Nevada Nanotech Systems Inc.            Topic: A13AT017

    We propose a platform for aerial environmental monitoring based on the integration of two advanced technologies for the first time: a lightweight, flying robotic platform capable of hovering and swarming, and a compact, low-power chemical sensor platform called the Molecular Property Spectrometer (MPS): a robust, low-cost, silicon-chip-based micro-electro-mechanical system (MEMS) that has been use ...

    STTR Phase I 2014 Department of DefenseArmy
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