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Award Data
The Award database is continually updated throughout the year. As a result, data for FY20 is not expected to be complete until September, 2021.
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Atomic Layer Deposition of PbZrxTi1-xO3 Thin Films for PiezoMEMS Applications
SBC: STRUCTURED MATERIALS INDUSTRIES, INC. Topic: A12aT020In this STTR program, Structured Materials Industries, Inc. (SMI) and partners will develop hardware and process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. ...
STTR Phase II 2014 Department of DefenseArmy -
Autonomous Broad Spectrum Environmental Sentinels
SBC: Nevada Nanotech Systems Inc. Topic: A13AT017We propose a platform for aerial environmental monitoring based on the integration of two advanced technologies for the first time: a lightweight, flying robotic platform capable of hovering and swarming, and a compact, low-power chemical sensor platform called the Molecular Property Spectrometer (MPS): a robust, low-cost, silicon-chip-based micro-electro-mechanical system (MEMS) that has been use ...
STTR Phase I 2014 Department of DefenseArmy