Award Data

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The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until September, 2020.

  1. Rapid Thermal Annealing System with Controlled Temperature Gradient and Annealing Time

    SBC: GT Equipment Technologies, Inc.            Topic: N/A

    Rapid thermal annealing (RTA) has been widely used in microelectronics fabrications. The current RTA system only provides uniform temperature distribution across the whole annealing chamber at any given time. Therefore, it greatly limits the implementation of combinatorial methodology in one single trial. This SBIR Phase 1 proposal investigates the feasibility of developing a temperature-time grad ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  2. Advanced Microcalorimeter Instrumentation for X-Ray Microanalysis

    SBC: STAR CRYOELECTRONICS LLC            Topic: N/A

    An innovative superconducting transition edge sensor (TES) microcalorimeter array with superconducting quantum interference device (SQUID) readouts is described for high energy and high spatial resolution X-ray energy dispersive spectroscopy and microanalysis. The proposed microcalorimeter instrument offers an energy resolution that is comparable to and potentially even better than wavelength disp ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
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