The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until June, 2020.
SBC: Fayette Environmental Services, Inc Topic: N/A
N/ASBIR Phase II 1997 Environmental Protection Agency
Novel Synthesis of Fluorinated Parylenes for Low-K Interlayer Dielectric Applications in Submicron ICsSBC: Brewer Science Incorporated Topic: N/A
As IC manufacturers pursue larger wafer sizes and smaller device features (0.25 um), the interlayer dielectric material becomes critical . Current interlayer dielectric materials, inorganic oxides and spin-coated polymeric materials, have serious deficiencies (e.g.,k >3, water absorption, and spin coating defects). This has led IC manufacturers to search for low-k($6000/lb) has hampered commercial ...SBIR Phase I 1997 Department of DefenseMissile Defense Agency