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Award Data

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The Award database is continually updated throughout the year. As a result, data for FY20 is not expected to be complete until September, 2021.

  1. Development of a Laboratory Scale CD-SAXS Device for Semiconductor Metrology Applications

    SBC: Jordan Valley Semiconductors, Inc.            Topic: N/A

    A semiconductor metrology tool will be developed employing the technique of small-angle x-ray scattering (SAXS) to measure the critical dimension (CD) of patterned device structures. The feasibility of the SAXS technique to measure CD has been shown using high-power synchrotron radiation facilities which are not of practical use to the semiconductor industry. The ultimate project goal is to produc ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  2. Advanced Microcalorimeter Instrumentation for X-Ray Microanalysis

    SBC: STAR CRYOELECTRONICS LLC            Topic: N/A

    An innovative superconducting transition edge sensor (TES) microcalorimeter array with superconducting quantum interference device (SQUID) readouts is described for high energy and high spatial resolution X-ray energy dispersive spectroscopy and microanalysis. The proposed microcalorimeter instrument offers an energy resolution that is comparable to and potentially even better than wavelength disp ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  3. Dual-Probe CD-AFM Calibration

    SBC: XIDEX CORPORATION            Topic: N/A

    Xidex proposes to demonstrate the feasibility of calibrating a critical-dimension atomic force microscope (CD-AFM) without the use of a reference artifact in such a way that high-precision critical dimensions can be generated independently of changes in probe tip shape. We plan to demonstrate sub-nanometer repeatability for tip-to-tip calibration, and demonstrate single-point critical-dimension me ...

    SBIR Phase II 2004 Department of CommerceNational Institute of Standards and Technology
  4. IMPROVEMENTS IN MOTOR OPERATED GATE VALVE DESIGN AND PREDICTIVE MODELS FOR RELIABILITY IMPROVEMENTS IN NUCLEAR POWER PLANT SAFETY SYSTEMS

    SBC: Kalsi Engineering, Incorporated            Topic: N/A

    MOTOR OPERATED GATE VALVE OPERABILITY PROBLEMS AND FAILURES AT NUCLEAR POWER PLANTS ARE A MAJOR SAFETY CONCERN AS STATEDIN NRC IE BULLETIN 85-03 AND GENERIC LETTER 89-10. THIS PROPOSAL IS AIMED AT IMPROVING GATE VALVE PERFORMANCE BY (1) DEVELOPING COMPREHENSIVE PERFORMANCE PREDICTION MODELS FOR USE OVER A RANGE OF OPERATING CONDITIONS, (2) DEFINING LIMITS, BASED ON SPECIFIC DESIGNS, BEYOND WHICH E ...

    SBIR Phase I 1990 Nuclear Regulatory Commission
  5. ELECTROMAGNETIC ENVIRONMENTAL EFFECTS WITHIN A NUCLEAR POWER PLANT

    SBC: MISSION RESEARCH CORP.            Topic: N/A

    MRC PROPOSES TO DEVELOP A SAFETY PERFORMANCE INDICATOR (PI) OF THE ELECTROMAGNETIC (EM) PROTECTION STATUS OF A NUCLEAR POWER PLANT (NPP). WE BELIEVE THAT SUCH A PI IS NEEDED BECAUSE: (1) EM ENVIRONMENTAL POLLUTION IS ON THE INCREASE,(2) ADDITIONAL EM THREATS MUST BE EVALUATED, AND (3) DISRUPTION OF NPP OPERATIONS BY EM EFFECTS CAN AND MUST BE AVOIDED. PREVIOUS STUDIES HAVE ADDRESSED THE ISSUE OF E ...

    SBIR Phase I 1990 Nuclear Regulatory Commission
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