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The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until April, 2020.

  1. A COMPUTATIONAL MODEL FOR THE DISCHARGE PHYSICS AND CHEMISTRY IN PLASMA PROCESSING

    SBC: SCIENTIFIC RESEARCH ASSOC., INC.            Topic: N/A

    PLASMA PROCESSING HAS BECOME AN IMPORTANT TECHNIQUE IN SEMICONDUCTOR DEVICE FABRICATION. IN ORDER TO IMPROVE PROCESS REPRODUCIBILITY AND DEVELOP PROCESS AND QUALITY CONTROL, THE GEC REFERENCE CELL HAS BEEN CHOSEN AT NIST AS THE EXPERIMENTAL STANDARD REACTOR WHICH IS DESIGNED TO ADVANCE THE NEXT GENERATION PLASMA PROCESSING EQUIPMENT. THE PROPOSED EFFORT ADDRESSES DEVELOPMENT OF A COMPREHENSIVEPRED ...

    SBIR Phase II 1993 Department of Commerce
  2. NOVEL AIR GAP INSULATED PISTON

    SBC: ADIABATICS INCORPORATED            Topic: N/A

    ADIABATICS, INC. IS PLEASED TO PROPOSE A RESEARCH PROGRAM TO DESIGN AN OPTIMUM PISTON FOR A HIGH TEMPERATURE MILITARY ENGINE. ADIABATICS, INC. HAS BEEN CONDUCTING A PROGRAM FOR TACOM TITLED "DEVELOPMENT OF TRIBOLOGICAL SYSTEMS AND ADVANCED HIGH TEMPERATURE IN-CYLINDER COMPONENTS FOR ADVANCED HIGH TEMPERATURE DIESEL ENGINES" FOR THE PAST FIVE YEARS. BASED ON OUR EXPERIENCE WITH DESIGNING COMPONENTS ...

    SBIR Phase II 1993 Department of DefenseArmy
  3. BIMETALLIC PRECURSORS FOR CHEMICAL VAPOR DEPOSITION

    SBC: Advanced Technologies/Laboratories Intl            Topic: N/A

    THE NEXT GENERATION OF HIGH POWER, HIGH FREQUENCY ELECTRONIC DEVICE TECHNOLOGY WILL BE BASED ON WIDE BANDGAP SEMICONDUCTOR MATERIALS SUCH AS SIC, GAN AND DIAMOND. OF THESE, SILICON CARBIDE IS THE MOST PROMISING MATERIAL FOR NEAR TERM APPLICATIONS, SINCE ITS PROCESSING SHARES MANY COMMON FEATURES WITH WELL-ESTABLISHED SILICON PROCESSING. TECHNOLOGY HAS BEEN DEMONSTRATED FOR PRODUCING OHMIC AND SCHO ...

    SBIR Phase II 1993 Department of DefenseMissile Defense Agency
  4. HIGH CONDUCTIVITY SILICON CARBIDE SUBSTRATES

    SBC: Advanced Technologies/Laboratories Intl            Topic: N/A

    HIGH POWER AND HIGH TEMPERATURE ELECTRONIC DEVICES ARE IMPORTANT IN BOTH DEFENSE AND COMMERCIAL SYSTEMS. BETA SILICON CARBIDE IS AN EXCELLENT CANDIDATE SEMICONDUCTOR MATERIAL FOR DEMANDING APPLICATIONS DUE TO ITS HIGH BREAKDOWN VOLTAGE, RELATIVELY LARGE BAND GAP, HIGH THERMAL CONDUCTIVITY AND HIGH MELTING POINT. USE OF SILICON CARBIDE THIN FILMS IS HAMPERED, HOWEVER, BY THE INABILITY TO REPRODUCIB ...

    SBIR Phase II 1993 Department of DefenseMissile Defense Agency
  5. IN-SITU X-RAY DETECTOR

    SBC: Advanced Technologies/Laboratories Intl            Topic: N/A

    IN-SITU MONITORING OF CRITICAL FILM PROPERTIES WOULD GREATLY ENHANCE PROCESS CONTROL OF THIN FILM COATING TECHNOLOGIES SUCH AS CHEMICAL VAPOR DEPOSITION (CVD) AND PHYSICAL VAPOR DEPOSITION (PVD). ATM, WORKING IN CONJUNCTION WITH PENNSYLVANIA STATE UNIVERSITY, PROPOSES TO INCORPORATE A POSITION SENSITIVE FIBER OPTIC X-RAY SCINTILLATION DETECTOR (PSSD) FOR REAL TIME X-RAY ANALYSIS OF CHEMICALLY VAPO ...

    SBIR Phase II 1993 Department of DefenseDefense Advanced Research Projects Agency
  6. DIAMOND COLD CATHODES FOR FLAT PANEL DISPLAYS

    SBC: Advanced Technologies/Laboratories Intl            Topic: N/A

    N/A

    SBIR Phase II 1993 Department of DefenseMissile Defense Agency
  7. PROCESS MONITORING AND CONTROL DURING PLASMA PROCESSING OF SEMICONDUCTORS

    SBC: Advanced Fuel Research, Inc.            Topic: N/A

    SUCCESSFUL PLASMA PROCESSING AND THE ELUCIDATION OF THE UNKNOWN PLASMACHEMISTRY REQUIRE SIMULTANEOUS KNOWLEDGE OF MANY PROCESS VARIABLES WITHIN THE PLASMA REACTOR. THESE VARIABLES INCLUDE 1) GAS TEMPERATURE AND COMPOSITION, 2) SUBSTRATE TEMPERATURE, AND 3) FILM THICKNESS, COMPOSITION, AND INDEX OF REFRACTION. THERE ARE CURRENTLY NO TECHNIQUES THAT CAN MONIOTR MORE THAN ONE OF THESE VARIABLES AT A ...

    SBIR Phase II 1993 Department of DefenseAir Force
  8. Miniaturized FT-IR Sensor for Infrared Measurements

    SBC: Advanced Fuel Research, Inc.            Topic: N/A

    2Phase II will develop an advanced dynamically-balanced "isolation interferometer" whose mirror motion is decoupled from external vibrations. Such an interferometer can be employed to make an FT-IR instrument which is immune to vibration and is permanently aligned. Advanced Fuel Research,Inc./On-line Technologies, Inc. will test both the plane mirror and corner cube designs, choose the best one an ...

    SBIR Phase II 1993 Department of DefenseMissile Defense Agency
  9. REAL TIME, LIGHT WEIGHT X-RAY IMAGER

    SBC: CIENCIA INC            Topic: N/A

    A COMPACT, LIGHT WEIGHT, LARGE AREA, HIGH RESOLUTION TWO-DIMENSIONAL REAL-TIME DIGITAL X-RAY IMAGING SYSTEM, BASED ON THE DEVELOPMENT OF AN INTEGRATED A-SI:H PHOTODIODE ARRAY AS IMAGE SENSOR IS PROPOSED. THE FIRST PROTOTYPE IMAGE SENSOR WILL HAVE A SENSITIVE AREA 8" X 10" WITH 1024 X 1280 PIXELS COUPLED TO AN OPTIMIZED SCINTILLATOR SUCH AS GD2O2S:TB AS AN X-RAY CONVERTER. EACH DIODE ELEMENT IS CON ...

    SBIR Phase II 1993 Department of DefenseArmy
  10. ADAPTIVE MULTISPECTRAL FILTER

    SBC: CIENCIA INC            Topic: N/A

    Tunable, acousto-optic filters (AOTF) for operation in the UV-VIS-IR spectral ranges are important elements in the design of advanced sensors for target acquisition, and discrimination. Their small size, random-access wavelength selection, rapid scan rates, and all solid-state construction with no moving parts, provide an attractive alternative to monochromators and filter wheels, for many applica ...

    SBIR Phase II 1993 Department of DefenseMissile Defense Agency

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