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Award Data

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The Award database is continually updated throughout the year. As a result, data for FY20 is not expected to be complete until September, 2021.

  1. SBIR Phase II:Directly Patternable Inorganic Hardmask for Nanolithography

    SBC: Inpria Corporation            Topic: EL

    This Small Business Innovation Research (SBIR) Phase II project aims to develop a robust, high-speed inorganic resist platform to revolutionize the manufacture of semiconductor devices with feature sizes < 30 nm. At present, there is no demonstrated organic or inorganic resist that satisfies all of the requirements - high speed, low line-width roughness (LWR), sufficient etch resistance - for patt ...

    SBIR Phase II 2010 National Science Foundation
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