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Award Data

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The Award database is continually updated throughout the year. As a result, data for FY20 is not expected to be complete until September, 2021.

Download all SBIR.gov award data either with award abstracts (290MB) or without award abstracts (65MB). A data dictionary and additional information is located on the Data Resource Page. Files are refreshed monthly.

  1. Wafer Level Supercritical Carbon Dioxide-Based Metal Deposition for Microelectronic Applications

    SBC: MiCell Technologies, Inc.            Topic: 04NCERP1

    This research project involves the application, development, and commercial scale up of a process for the deposition of copper and copper barrier materials such as ruthenium, titanium, and other metals. This process could replace copper electroplating currently used to fill deep trenches and thin-film deposition in microelectronic circuit manufacturing. In addition, physical vapor depo ...

    SBIR Phase II 2005 Environmental Protection Agency
  2. Wafer Level Supercritical Carbon Bioxide-Based Metal Depositon for Microelectronic Applications

    SBC: MiCell Technologies, Inc.            Topic: N/A

    This proposal describes the application, development and commercial scale-up of a process successfully developed under EPA contract number EP-D-04-042 for the deposition of copper and copper barrier materials such as ruthenium, titanium and other metals. This process could replace CU electroplating currently used to fill deep trenches and thin film deposition in microelectronic circuit manufactur ...

    SBIR Phase II 2005 Environmental Protection Agency
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