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Award Data

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The Award database is continually updated throughout the year. As a result, data for FY20 is not expected to be complete until September, 2021.

  1. High-Throughput Experimentation Physical Vapor Deposition (PVD) Chamber for Accelerated Microelectronics Materials Research and Development

    SBC: PVD Products, Inc.            Topic: DMEA07001

    Techniques for producing combinatorial materials are highly valued for their ability to produce compositional arrays that can be rapidly evaluated. A significant aspect that is still lacking in combinatorial film deposition is the ability to efficiently deposit multiple material conditions in specified isolated areas on a large silicon wafer while varying local composition and deposition conditio ...

    SBIR Phase I 2008 Department of DefenseDefense Microelectronics Activity
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