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High-Throughput Experimentation Physical Vapor Deposition (PVD) Chamber for Accelerated Microelectronics Materials Research and DevelopmentSBC: PVD Products, Inc. Topic: DMEA07001
Techniques for producing combinatorial materials are highly valued for their ability to produce compositional arrays that can be rapidly evaluated. A significant aspect that is still lacking in combinatorial film deposition is the ability to efficiently deposit multiple material conditions in specified isolated areas on a large silicon wafer while varying local composition and deposition conditio ...SBIR Phase I 2008 Department of DefenseDefense Microelectronics Activity