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SBC: OPTOWARES INC Topic: DMEA16B001
There is a lack of a non-destructive metrology tool to measure the thickness of thin films on sapphire substrates due to the transparency of the substrate. Leveraging our extensive experience building sensor systems combined with MIT Lincoln Laboratory’s expertise in theoretical modeling, we will design and build an innovative thin film measurement tool using Raman spectroscopy. Our metrology sy ...STTR Phase II 2019 Department of DefenseDefense Microelectronics Activity
SBC: ADVANCED COOLING TECHNOLOGIES INC Topic: DMEA16B001
Silicon-on-sapphire (SOS) integrated circuits have achieved popularity due to their high speed performance and low power consumption in radio frequency applications. An important aspect of the SOS fabrication process that must be verified to maximize yield is the thickness of the thin films deposited on the sapphire substrate. However, due to the transparent nature of sapphire, current optical met ...STTR Phase II 2018 Department of DefenseDefense Microelectronics Activity