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Award Data
The Award database is continually updated throughout the year. As a result, data for FY23 is not expected to be complete until September, 2024.
Download all SBIR.gov award data either with award abstracts (290MB)
or without award abstracts (65MB).
A data dictionary and additional information is located on the Data Resource Page. Files are refreshed monthly.
The SBIR.gov award data files now contain the required fields to calculate award timeliness for individual awards or for an agency or branch. Additional information on calculating award timeliness is available on the Data Resource Page.
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Metrology of Thin Films on Sapphire Substrate
SBC: OPTOWARES INC Topic: DMEA16B001There is a lack of a non-destructive metrology tool to measure the thickness of thin films on sapphire substrates due to the transparency of the substrate. Leveraging our extensive experience building sensor systems combined with MIT Lincoln Laboratory’s expertise in theoretical modeling, we will design and build an innovative thin film measurement tool using Raman spectroscopy. Our metrology sy ...
STTR Phase II 2019 Department of DefenseDefense Microelectronics Activity -
Thickness Measurement Technology for Thin Films on Sapphire Substrate
SBC: ADVANCED COOLING TECHNOLOGIES INC Topic: DMEA16B001Silicon-on-sapphire (SOS) integrated circuits have achieved popularity due to their high speed performance and low power consumption in radio frequency applications. An important aspect of the SOS fabrication process that must be verified to maximize yield is the thickness of the thin films deposited on the sapphire substrate. However, due to the transparent nature of sapphire, current optical met ...
STTR Phase II 2018 Department of DefenseDefense Microelectronics Activity
