Award Data

Silicon-on-sapphire (SOS) integrated circuits have achieved popularity due to their high speed performance and low power consumption in radio frequency applications. An important aspect of the SOS fabrication process that must be verified to maximize yield is the thickness of the thin films deposited on the sapphire substrate. However, due to the transparent nature of sapphire, current optical met ...

There is a lack of a non-destructive metrology tool to measure the thickness of thin films on sapphire substrates due to the transparency of the substrate. Leveraging our extensive experience building sensor systems combined with MIT Lincoln Laboratory’s expertise in theoretical modeling, we will design and build an innovative thin film measurement tool using Raman spectroscopy. Our metrology sy ...

percapacitors provide energy densities comparable to thin film batteries, high power densities, ultrafast recharge, and long cycle lives for applications requiring high duty cycle and pulse power output.  Micro-supercapacitors (MSC) are the most promising energy storage technology for integration with energy harvesting, via micro-electro-mechanical systems (MEMS), and microelectronics integrated ...

The inherent advantages of MEMS technology, including small size and cost-effective fabrication, make it ideal for numerous application in a wide range of industries ranging from defense, automotive, medical, to consumer industries. For applications that require self-powered MEMS electronics, an integrated energy storage device is required. Due to their small size, excellent cycle life and high po ...

While supercapacitors have been demonstrated for decades, the biggest challenge is to develop a reliable fabrication strategy which can integrate these devices with current CMOS (complementary metal oxide semiconductor) technology. Current fabrication technologies do not have good compatibility with other electronic components or cannot manufacture the supercapacitor in a small form factor. Conseq ...

Due to recent advances in the field of microelectronics, there is an increasing demand for micro-sized energy storage devices that are capable of being incorporated into and provide energy for MEMS devices. In order to continue to enable this technological growth, and the benefits that stem from it, the storage density of electrical energy must also continually be improved, especially with respect ...

Electrochemical double-layer (ECDL) capacitors have tremendous potential as high-power delivery energy storage elements in low-volume and low-weight microelectronics systems. ECDL electrodes based on nanostructured carbon offer the potential for exception

The increasing penetration of MEMs devices into the commercial market has lead to an increasing demand for micro-sized electrical energy storage devices to interface with a support them. Electrochemical double layer capacitors hold significant promise as

The proposed research and technical objectives in this project deal with computerized automatic delayering and polishing system that would be applicable to both commercial and government semiconductor device research and development with applications including Failure Analysis (FA), Fault Isolation (FI), and Reverse Engineering (RE) of semiconductor microelectronic devices. This project could hel ...