Award Data

The inherent advantages of MEMS technology, including small size and cost-effective fabrication, make it ideal for numerous application in a wide range of industries ranging from defense, automotive, medical, to consumer industries. For applications that require self-powered MEMS electronics, an integrated energy storage device is required. Due to their small size, excellent cycle life and high po ...

While supercapacitors have been demonstrated for decades, the biggest challenge is to develop a reliable fabrication strategy which can integrate these devices with current CMOS (complementary metal oxide semiconductor) technology. Current fabrication technologies do not have good compatibility with other electronic components or cannot manufacture the supercapacitor in a small form factor. Conseq ...

Due to recent advances in the field of microelectronics, there is an increasing demand for micro-sized energy storage devices that are capable of being incorporated into and provide energy for MEMS devices. In order to continue to enable this technological growth, and the benefits that stem from it, the storage density of electrical energy must also continually be improved, especially with respect ...

The proposed research and technical objectives in this project deal with computerized automatic delayering and polishing system that would be applicable to both commercial and government semiconductor device research and development with applications including Failure Analysis (FA), Fault Isolation (FI), and Reverse Engineering (RE) of semiconductor microelectronic devices. This project could hel ...