Award Data

We will demonstrate the capability of scatterometry to provide a process monitor to post exposure bake of chemically amplified photoresist. Two or more scatterometers will be designed that are capable of monitoring the intensities of multiple diffraction orders that result from illuminating device patterns of photoresist. The goal is to demonstrate the capability of scatterometry to provide a PEB ...

This proposal is directed at creating discontinuous unidirectional composite from continuous unidirectional prepreg. The process, Selectively-Discontinuous-Fiber (SDF), introduces micro-cuts in preimpregnated unidirectional materials at specified locations. This process will allow unidirectional composite prepreg to be used for the fabrication of complex-compound components that have be ...

There has been continuous improvement in commercial Land Cellular telephone technology since deployment of the first analog system - Advanced Mobile Phone Service - in 1984. Each new generation of air interface embodies increasingly sophisticated signal modulation schemes providing improved spectrum utilization and network capacity. Today, a state-of-the-art commercial digital Cellular ...

The final prototype of the Microcircuit Board Repair apparatus will be capable of laying down or lifting metal strips with micrometer dimensions. Under real time computer control, the translation stages will be fully automated or manually controlled. The end user will monitor the process in real time using a camera attached with the source. Laying down the metal lines will be done using Laser C ...

Survival of present day microelectronic circuits depends on their protection from self generated and external electromagnetic interference. This proposal is oriented toward the class of interference generally referred to as overvoltage transients. Means for mitigating these transients include gas discharge tubes, and various solid state devices. Each of these has their own advantages in particu ...

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There is a substantial body of evidence demonstrating that biofilms growing inside the water lines of dental units pose a significant risk as a source of infection. The problem has been recognized by practitioners, regulators, manufacturers, and the ADA, with the ADA proposing a set of guidelines for water quality that include a limit of 200 colony forming units per milliliter for the year 2000. ...

Chemiluminescence is a powerful analytical technique that exhibits high sensitivity and selectivity. This technique when coupled with electrolysis is greatly advantageious over the conventional methods as the reagents are produced in situ at the electrode. The presence of trace amounts of solvents such as TCE, PCE, methylene chloride and carbon tetrachloride can be monitored using the method of ...

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Optomec Design Company proposes to use Laser Engineered Net Shaping (LENSTM), a Rapid Prototyping and Manufacturing (RP&M) technology currently under development at Sandia National Laboratories (SNL), as a new method for integrating instrumentation (e.g., embedded sensors) into metal structural components. SNL has demonstrated the ability of the LENSTM technology to produce near net shape stainles ...