Award Data

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The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until September, 2020.

  1. Large-Area, High-Uniformity Photodiodes for Infrared Trap Detectors

    SBC: Amethyst Research Incorporated            Topic: 9020168R

    methyst Research Inc. will design, fabricate and test a high uniformity, large area, low noise infrared trap-detector detector for the 1- 4.5 μm wavelength range. This state of the art detector will have a large area (e.g., 1-1.8 cm diameter active area) with a spatial variability of internal quantum efficiency of less than 0.1 % between 1 μm and 4.5 μm. In addition, the internal quantum effici ...

    SBIR Phase I 2015 Department of CommerceNational Institute of Standards and Technology
  2. Development of a Laboratory Scale CD-SAXS Device for Semiconductor Metrology Applications

    SBC: Jordan Valley Semiconductors, Inc.            Topic: N/A

    A semiconductor metrology tool will be developed employing the technique of small-angle x-ray scattering (SAXS) to measure the critical dimension (CD) of patterned device structures. The feasibility of the SAXS technique to measure CD has been shown using high-power synchrotron radiation facilities which are not of practical use to the semiconductor industry. The ultimate project goal is to produc ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  3. Microresonator-based High-performance High-pressure Sensor

    SBC: Nomadics, Inc.            Topic: N/A

    In this Phase I SBIR, Nomadics will build on our past experience with micro-structure resonators and quartz-based sensors to develop a pressure sensor suitable for high pressure applications such as oil and gas industry applications. In the Phase I work, the outstanding measurement resolution of our sensing technology will be demonstrated and the feasibility of this technology for pressure sensing ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  4. Ultra-High Vacuum Compatible Wavelength Dispersive X-ray Spectrometer

    SBC: PARALLAX RESEARCH INC            Topic: N/A

    Parallax Research, Inc. proposes to develop an Ultra-High Vacuum Compatible Wavelength Dispersive X-ray Spectrometer for use on Field Emission Scanning Electron Microscopes, Transmission Electron Microscopes, Auger Spectroscopy Systems, and X-ray Photo-electron Spectroscopy Systems. We propose to build on Parallax's designs of innovative parallel beam x-ray spectrometers and incorporate new types ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  5. Dual-Probe CD-AFM Calibration

    SBC: XIDEX CORPORATION            Topic: N/A

    Xidex proposes to demonstrate the feasibility of calibrating a critical-dimension atomic force microscope (CD-AFM) without the use of a reference artifact in such a way that high-precision critical dimensions can be generated independently of changes in probe tip shape. We plan to demonstrate sub-nanometer repeatability for tip-to-tip calibration, and demonstrate single-point critical-dimension me ...

    SBIR Phase II 2004 Department of CommerceNational Institute of Standards and Technology
  6. Standard Robot Platform Designed for Unstructured Environment Research

    SBC: Targazyme, Inc.            Topic: N/A

    Robotic researchers currently are using insufficient and varying robot platforms to investigate issues crucial to the successful development of a remote reconnaissance tool for the urban search and rescue (USAR) community. USAR robotic researchers need a standard robot platform designed for research in unstructured environments. This platform would accelerate the research essential to advancing re ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
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