Award Data

Modern Model-Based Enterprise / Engineering (MBE) systems rely on freeform surfaces built as complex combinations of geometric primitives to define engineered objects. Unfortunately, the intersection of freeform surfaces in MBE applications results in highly approximated solutions, degrading models that cost billions annually by US industry to fix. Current technology limits the abilities of users ...

In this Phase I SBIR proposal, SandBox Semiconductor™ proposes to develop an Advanced Manufacturing and Material Measurements software tool called Weave ™ for accelerating and automating SEM image analysis for the semiconductor industry. During the development of a new manufacturing process line for a semiconductor device, tens of thousands of scanning electron microscopy (SEM) images are take ...

Conventional characterization and test methods are increasingly ineffective when applied to structures less than 100 nanometers, causing challenges across R&D, process control and failure analysis. An increasing number of subtle defects become prominent drivers of failure as device size and operating margins decrease, e.g., processing anomalies in thin gate oxides, substrate problems related to do ...

methyst Research Inc. will design, fabricate and test a high uniformity, large area, low noise infrared trap-detector detector for the 1- 4.5 μm wavelength range. This state of the art detector will have a large area (e.g., 1-1.8 cm diameter active area) with a spatial variability of internal quantum efficiency of less than 0.1 % between 1 μm and 4.5 μm. In addition, the internal quantum effici ...

Standards and specifications are widely used in government and industry to define requirements for products and processes and insure interoperability, safety, and quality of industrial and domestic products. Specifications and standards documents almost always cross-reference other standards and specification. Taken together, the web of interdependent standards forms an immensely important knowled ...

Nanometrology International, Inc. (NMI) proposes to demonstrate the feasibility of 3-dimensional (3D) characterization of nanoscale objects using scanning probe microscopy (SPM) with a measurement uncertainty of less than 0.7 nm. To accomplish this task, we propose a novel method of 3D tip characterization and use of an innovative surface reconstruction algorithm recently introduced by NIST and th ...