Award Data

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The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until June, 2020.

  1. Development of a Laboratory Scale CD-SAXS Device for Semiconductor Metrology Applications

    SBC: Jordan Valley Semiconductors, Inc.            Topic: N/A

    A semiconductor metrology tool will be developed employing the technique of small-angle x-ray scattering (SAXS) to measure the critical dimension (CD) of patterned device structures. The feasibility of the SAXS technique to measure CD has been shown using high-power synchrotron radiation facilities which are not of practical use to the semiconductor industry. The ultimate project goal is to produc ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  2. Microresonator-based High-performance High-pressure Sensor

    SBC: Nomadics, Inc.            Topic: N/A

    In this Phase I SBIR, Nomadics will build on our past experience with micro-structure resonators and quartz-based sensors to develop a pressure sensor suitable for high pressure applications such as oil and gas industry applications. In the Phase I work, the outstanding measurement resolution of our sensing technology will be demonstrated and the feasibility of this technology for pressure sensing ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  3. Ultra-High Vacuum Compatible Wavelength Dispersive X-ray Spectrometer

    SBC: PARALLAX RESEARCH INC            Topic: N/A

    Parallax Research, Inc. proposes to develop an Ultra-High Vacuum Compatible Wavelength Dispersive X-ray Spectrometer for use on Field Emission Scanning Electron Microscopes, Transmission Electron Microscopes, Auger Spectroscopy Systems, and X-ray Photo-electron Spectroscopy Systems. We propose to build on Parallax's designs of innovative parallel beam x-ray spectrometers and incorporate new types ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  4. Advanced Microcalorimeter Instrumentation for X-Ray Microanalysis

    SBC: STAR CRYOELECTRONICS LLC            Topic: N/A

    An innovative superconducting transition edge sensor (TES) microcalorimeter array with superconducting quantum interference device (SQUID) readouts is described for high energy and high spatial resolution X-ray energy dispersive spectroscopy and microanalysis. The proposed microcalorimeter instrument offers an energy resolution that is comparable to and potentially even better than wavelength disp ...

    SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
  5. Dual-Probe CD-AFM Calibration

    SBC: XIDEX CORPORATION            Topic: N/A

    Xidex proposes to demonstrate the feasibility of calibrating a critical-dimension atomic force microscope (CD-AFM) without the use of a reference artifact in such a way that high-precision critical dimensions can be generated independently of changes in probe tip shape. We plan to demonstrate sub-nanometer repeatability for tip-to-tip calibration, and demonstrate single-point critical-dimension me ...

    SBIR Phase II 2004 Department of CommerceNational Institute of Standards and Technology
  6. Fulcrum Biometrics' Plan for Research and Development of WS-BD Conformant Handheld Fingerprint Sensor

    SBC: Fulcrum Biometrics, LLC            Topic: N/A

    Trusted biometric validation of individual identities has never been more important. Several contributing factors are the increase in global terrorism, identity theft and the increase in legislation which are driving the accelerated adoption of biometric technology. Unfortunately, the biometrics industry has not actively responded to the changing market conditions being driven by the explosion in ...

    SBIR Phase I 2012 Department of CommerceNational Institute of Standards and Technology
  7. Improved Microcalorimeter Detectors for X-Ray Chemical Shift Mapping

    SBC: STAR CRYOELECTRONICS LLC            Topic: N/A

    X-ray fluorescence spectroscopy is a widely used and extremely sensitive analytical technique for qualitative as well as quantitative chemical analysis. Superconducting Transition Edge Sensor (TES) microcalorimeter detectors have now been developed that achieve an energy resolution of 2 eV (full width at half maximum) for 1.5 keV X-rays, which is sufficient to enable the measurement of the small s ...

    SBIR Phase I 2012 Department of CommerceNational Institute of Standards and Technology
  8. Large-Area, High-Uniformity Photodiodes for Infrared Trap Detectors

    SBC: AMETHYST RESEARCH INCORPORATED            Topic: 9020168R

    methyst Research Inc. will design, fabricate and test a high uniformity, large area, low noise infrared trap-detector detector for the 1- 4.5 μm wavelength range. This state of the art detector will have a large area (e.g., 1-1.8 cm diameter active area) with a spatial variability of internal quantum efficiency of less than 0.1 % between 1 μm and 4.5 μm. In addition, the internal quantum effici ...

    SBIR Phase I 2015 Department of CommerceNational Institute of Standards and Technology
  9. Cognitive Residential Heat Pumps Fault Detection and Diagnostic Datalogger

    SBC: MANAGEMENT SCIENCES INC            Topic: 9010173R

    During Phase I, Management Sciences, Inc. (MSI) proved feasibility of adapting their current technology into a product capable of improving performance resulting in increased efficiency and extended life cycles of heat pumps. The resultant product is a tool named the Heat Pump Sentient (HP-Sentient). The HP-Sentient will improve performance and reduce maintenance costs through aggressive goal-seek ...

    SBIR Phase II 2015 Department of CommerceNational Institute of Standards and Technology
  10. Precision 10 kV Programmable Voltage Source

    SBC: Low Thermal Electronics, Inc.            Topic: NA

    Low Thermal Electronics, Inc. proposes to design a stand-alone, programmable voltage source capable of supplying precision voltages in the range of zero to 1,000 volts direct current (DC), with options for scaling up to 10,000 volts, and with a total expanded uncertainty (k=2) of less than 10uV/V for the 10,000 volt version. This instrument will improve state-of-the-art measurements in high resist ...

    SBIR Phase I 2017 Department of CommerceNational Institute of Standards and Technology
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