Award Data

We will demonstrate the capability of scatterometry to provide a process monitor to post exposure bake of chemically amplified photoresist. Two or more scatterometers will be designed that are capable of monitoring the intensities of multiple diffraction orders that result from illuminating device patterns of photoresist. The goal is to demonstrate the capability of scatterometry to provide a PEB ...

Binary optics can be used for fabrication of microlenses for IR focal plane arrays (FPAs). There is a need to improve the light collection efficiency and reduction in size for the detectors to improve on the signal to noise ratio and relaxation of the cooling requirements. Binary optics lenses can be used to reduce the area of the detectors by a factor of 10 to 20. We propose to design and fabrica ...

The objective of this project is to conduct a theoretical and experimental investigation of the feasibility of a clean-burning, natural gas-fired thermophotovoltais (TPV) power generator with substantially improved power density for hybrid vehicle applications. The TPV power generator technology under development utilizes a patented breakthrough in internal heat recuperation (IHR) and proprietary ...

Events including the Oklahoma CIty bombing and the Sarin attack in the Tokyo subway have emphasized the vulnerability of personnel, both military and civilian, to unexpected attack with conventional explosives and chemical substances. To combat this threat requires portable, low cost sensor systems capable of detecting a variety of dangerous materials at extremely low concentrations. Such a tech ...

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Princeton Electronic Systems proposes the development of a new type of x-ray imager for diagnostic medical imaging for field applications. The device will be easy to fabricate and will have high resolution and image quality and will be available at low cost. A detector array will be fabricated using a new material and simple fabrication technique using only two levels of photolithographic masking. ...

Tetra Corporation proposes to investigate an innovative treatement process for the combined removal of metallic ions and the destruction of volatile organic chemicals in waste water. Both metal ion and volatile organic contaminants are commonly found in water. Tetra Corporation would thus propose to investigate the removal of metal ions and the destruction of volatile organic chemicals from contam ...

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