Award Data

We will demonstrate the capability of scatterometry to provide a process monitor to post exposure bake of chemically amplified photoresist. Two or more scatterometers will be designed that are capable of monitoring the intensities of multiple diffraction orders that result from illuminating device patterns of photoresist. The goal is to demonstrate the capability of scatterometry to provide a PEB ...

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Combustion chemical vapor deposition (CCVDsm) which was invented by the principal investigator, is a high quality film deposition technique that can inexpensively and quickly apply yttria stablized zirconia (YSZ) and doped-LaCrO3 thin films in a continuous manner. This technology can be used for the production of fuel cells. CCVD is low cost, high quality and versatile. It does not require a react ...

Survival of present day microelectronic circuits depends on their protection from self generated and external electromagnetic interference. This proposal is oriented toward the class of interference generally referred to as overvoltage transients. Means for mitigating these transients include gas discharge tubes, and various solid state devices. Each of these has their own advantages in particu ...

Carbon-Carbon components, initially developed for the aerospace industry, have experienced minimal commercialization over the past decade due to cost constraints. C-C composites are excellent candidates for a wide variety of components such as automotive clutches, brakes, and liners, due to its friction and heat transfer characteristics. Recently, within the past five (5) years, new C-C processing ...

The GAO has reported to Congress that the loss due to fraudulent health care activity amounted to an estimated $84 billion in 1992. The ability to detect fraud and abuse is critical to the reduction of health care costs. The claims processing system will soon undergo rapid change with the introduction of rapid payment transaction processing systems. The emphasis on rapid turn around combined with ...

Events including the Oklahoma CIty bombing and the Sarin attack in the Tokyo subway have emphasized the vulnerability of personnel, both military and civilian, to unexpected attack with conventional explosives and chemical substances. To combat this threat requires portable, low cost sensor systems capable of detecting a variety of dangerous materials at extremely low concentrations. Such a tech ...

Although great strides have been taken to generate and render problem geometries using computer automated design packages, as well as advancements in the the development of computational electromagnetics codes to solve Maxwell's equations, the link between the two is still very weak. Practical geometries have complex geometric features, abrupt changes in electromagnetic constitutive parameters, an ...

We propose, in Phase I and Phase II, to build an X-ray simulator capable of easy transportation between sites which can be built for a low cost (

Tetra Corporation proposes to investigate an innovative treatement process for the combined removal of metallic ions and the destruction of volatile organic chemicals in waste water. Both metal ion and volatile organic contaminants are commonly found in water. Tetra Corporation would thus propose to investigate the removal of metal ions and the destruction of volatile organic chemicals from contam ...