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The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until April, 2020.

  1. HIGH BRIGHTNESS X-RAY SOURCES FOR X-RAY LITHOGRAPHY

    SBC: Medox Electro-optics Inc.            Topic: N/A

    LASER DRIVEN PLASMA SOURCES ARE POTENTIAL X-RAY SOURCES FOR MICROLITHOGRAPHIC APPLICATIONS. UNFORTUNATELY, TO DATE, THESE PLASMA SOURCES HAVE NOT PRODUCED THE X-RAY INTENSITIES REQUIRED FOR LARGE SCALE MANUFACTURING. CHIRPED PULSE AMPLIFICATION, AN INNOVATIVE LASER ARCHITECTURE CONCEPT, COMPATIBLE WITH MOST SOLID STATE SOURCES, IS CAPABLE OF INCREASING THE PEAK POWER OF SMALL LASER SYSTEMS ONE THO ...

    SBIR Phase II 1991 Department of DefenseDefense Advanced Research Projects Agency
  2. IMPLEMENTATION OF NEW GALLIUM ARSENIDE GROWTH TECHNIQUE (VERTICAL FLOAT ZONE) DEVELOPED AT NAVAL RESEARCH LABORATORY

    SBC: Mellen Co Inc.            Topic: N/A

    N/A

    SBIR Phase II 1991 Department of DefenseDefense Advanced Research Projects Agency
  3. DEVELOPMENT OF DIAMOND THIN FILM PROCESS

    SBC: Ttl Techniques            Topic: N/A

    N/A

    SBIR Phase II 1991 Department of DefenseDefense Advanced Research Projects Agency

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