Award Data

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The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until June, 2020.

  1. NANOMETER-SIZE STEP HEIGHT TEST STRUCTURES

    SBC: Advanced Technologies/Laboratories Intl            Topic: N/A

    MCNC PROPOSES A FEASIBILITY STUDY AND EVALUATION OF THREE PROMISING APPROACHES TO THE FABRICATION OF SURFACE TEST STRUCTURES ON SILICON. SURFACE FEATURES ON THE FIRST STRUCTURE WILL BE PRODUCED BY CONTROLLABLY ETCHING THERMALLYGROWN OXIDES. FEATURES ON THE SECOND WILL BE MADE BY ETCHING PIEZOELECTRIC THIN FILMS. USING THE PIEZOELECTRIC FILM AS PART OF A CAPACITOR, STEP-HEIGHT CAN BE VARIED AND PRO ...

    SBIR Phase I 1992 Department of Commerce
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