Award Data

The GAO has reported to Congress that the loss due to fraudulent health care activity amounted to an estimated $84 billion in 1992. The ability to detect fraud and abuse is critical to the reduction of health care costs. The claims processing system will soon undergo rapid change with the introduction of rapid payment transaction processing systems. The emphasis on rapid turn around combined with ...

Multichip modules (MCMs) have allowed the microelectronics industry to produce relatively small, highly-integrated circuitry with performances that far exceeds that of other packaging technologies such as separately packaged ICs soldered onto a printed circuit board. Bare dies are packaged together on a small substrate area, resulting in higher chip densities and shorter interconnects, and therefo ...

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We will demonstrate the capability of scatterometry to provide a process monitor to post exposure bake of chemically amplified photoresist. Two or more scatterometers will be designed that are capable of monitoring the intensities of multiple diffraction orders that result from illuminating device patterns of photoresist. The goal is to demonstrate the capability of scatterometry to provide a PEB ...

With all the uncertainties in complex Distribute Hybrid Systems (DHS), one key probelm is the definition of a reasonable set of tests (and tools) that will evaluate both the extrmees and the nominal behaviors associated with real-world situations. This general lack of confidence for AI components has prevented a wider acceptance of KBS use in DHS. The challenge is how to test the logic, rules, alg ...

A research and development program is proposed for developing and implementing a low temperature, highly anisotropic, reliable, environmentally benign reactive ion etching (RIE) for complex-oxide films. The RIE Process will be optimized such that it is highly selective (e.g., >5), with high etch rates (e.g., >50 nm/min) and there i minimal or no damage to underlying layers. Furthermore, effort wil ...

A Phase I study is proposed to investigate the feasibility of applying a novel ray-tracing technique for electromagnetic propagation through the dense, refractive media of the earth's upper surface. Application of the technique to modern radar and navigation technology should result in the ability to conduct airborne surveillance of subsurface targets with three dimensional spatial resolution of l ...

A significant problem in precision manufacturing of large parts/assemblies is the requirement to make measurements over the surfacesof these parts for a variety of reasons including inspection/quality control; control of surfacing operations such as coatings, abrasive erosion, buffing, and texturing; and generation of "as built" documentation. A specific instance of this class of problem has been ...

Tetra Corporation proposes to investigate an innovative treatement process for the combined removal of metallic ions and the destruction of volatile organic chemicals in waste water. Both metal ion and volatile organic contaminants are commonly found in water. Tetra Corporation would thus propose to investigate the removal of metal ions and the destruction of volatile organic chemicals from contam ...

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