The Award database is continually updated throughout the year. As a result, data for FY19 is not expected to be complete until April, 2020.
SBC: RSOFT DESIGN GROUP Topic: N/A
This proposal is aimed at developing a full software solution for the next generation advanced optical metrology. Existing simulation tools cannot meet the current and future needs of scattering-based optical metrology for semiconductor manufacturing. Our proposed work will first focus on developing an enhanced RCWA-based simulation engine with advanced algorithms for fast convergence and stabilit ...SBIR Phase I 2004 Department of CommerceNational Institute of Standards and Technology
SBC: Advanced Design Consulting USA, Inc. Topic: N/A
Improving the quality and intensity of the x-ray beam is an important design goal for every synchrotron installation. Although small, the effects of vacuum windows on x-ray absorption and phase contrast cannot be neglected. Synchrotron x-rays have wavelengths on the order of one Angstrom (1 x 10-10m), the same order of magnitude as inter-atomic distances. These x-rays are used to study many differ ...SBIR Phase I 2003 Department of CommerceNational Institute of Standards and Technology