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Award Data
The Award database is continually updated throughout the year. As a result, data for FY24 is not expected to be complete until March, 2025.
Download all SBIR.gov award data either with award abstracts (290MB)
or without award abstracts (65MB).
A data dictionary and additional information is located on the Data Resource Page. Files are refreshed monthly.
The SBIR.gov award data files now contain the required fields to calculate award timeliness for individual awards or for an agency or branch. Additional information on calculating award timeliness is available on the Data Resource Page.
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MODELING OF 3-D DIFFRACTION AND SCATTERING FROM SUBMICRON OBJECTS ON SILICON FOR PARTICULATE MONITORING AND PHOTOLITHOGRAPHY
SBC: Thornton Tomasetti, Inc. Topic: N/AIN PHASE I, WE PROPOSES TO USE THREE-DIMENSIONAL NUMERICAL SOLUTIONS OF MAXWELL'S EQUATIONS TO SHOW THAT DIFFRACTION AND SCATTERING PROBLEMS IN PHOTOLITHOGRAPHY AND DEFECT INSPECTION CAN BE ADDRESSED BY ANALYSIS. THESE SOLUTIONS WILL DEVELOP DATA OF GREAT BENEFIT TO MANUFACTURERS OF INTEGRATED CIRCUITS. THE MODELING OF 3-D DIFFRACTION AND SCATTERING PATTERNS BEARS ON THE FOLLOWING TOPICS: 1. THE P ...
SBIR Phase II 1987 National Science Foundation