A New Instrument for Quantitive Measurements of High-Ionization Thereshold Elements in Nanostructures

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$98,992.00
Award Year:
1997
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Award Id:
36496
Agency Tracking Number:
36496
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
114 Ridgeway Center, Oak Ridge, TN, 37830
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Heinrich Arlinghaus
(423) 483-1113
Business Contact:
() -
Research Institute:
n/a
Abstract
The objective of the project is to develop a new mass spectrometric diagnostic tool that will allow quantitative measurement on a nanometer scale of elements having a high ionization potential, such as hydrogen, carbon, nitrogen, oxygen fluorine, and phosphorous. The proposed work would extend the proven capabilities of laser resonance postionization of sputtered material to enable efficient measurements of high-ionization threshold elements in nanoscale devices. Two advances are required to enable these highly sensitive and selective measurements over tens of nm scales, with essentially no matrix effects: 1) demonstrating effective one-photon resonance ionization for the chosen elements, and 2) removing vibrations and drift from existing instrumentation. Work in Phase I is aimed at developing vacuum ultraviolet laser wavelengths to accomplish the first of these requirements. Assuming successful completion of Phase I and Phase II, the high efficiency (3% to 8% useful yield) and lack of matrix effects characteristic of resonance postionization measurements would allow quantitative measurements of major constituents in extremely small dimensions (e.g., 50 nm x 550 nm x 1 nm), even in dynamic stoichiometries. Measurement of low-concentration constituents, dopants, and impurities could be performed in slightly larger volumes.

* information listed above is at the time of submission.

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