Atomic Precision Systems Inc.
Santa Clara, CA, 95051 6420
|# of Employees:||2|
|Socially and Economically Disadvantaged:||Y|
The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN t ...SBIRPhase II2008National Science Foundation
This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor ...SBIRPhase I2007National Science Foundation