Atomic Precision Systems Inc.
| 301 Rosemont Drive
Santa Clara, CA, 95051 6420
|Socially and Economically Disadvantaged:||Y|
|Number of Employees:||2|
The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN t ...SBIR Phase II 2008 National Science Foundation
This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor ...SBIR Phase I 2007 National Science Foundation