Atomic Precision Systems Inc.

Basic Information

301 Rosemont Drive
Santa Clara, CA, 95051 6420

Company Profile

n/a

Additional Details

Field Value
DUNS: 126175699
Hubzone Owned: N
Socially and Economically Disadvantaged: Y
Woman Owned: N
Number of Employees: 2


  1. SBIR Phase II: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films

    Amount: $499,908.00

    The Small Business Innovation Research (SBIR) Phase II project will develop a novel high-speed Atomic Layer Deposition technology comprising an ALD reactor and associated thin film processes for GaN t ...

    SBIR Phase II 2008 National Science Foundation
  2. SBIR Phase I: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films

    Amount: $100,000.00

    This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor ...

    SBIR Phase I 2007 National Science Foundation

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