SBIR Phase I: High-Speed Atomic Layer Disposition System for Compound Semiconductor Thin Films

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 0637512
Agency Tracking Number: 0637512
Amount: $100,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2007
Solicitation Year: 2005
Solicitation Topic Code: MI
Solicitation Number: NSF 05-557
Small Business Information
301 Rosemont Drive, Suite 400, Santa Clara, CA, 95051
DUNS: 126175699
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: Y
Principal Investigator
 Prasad Gadgil
 (408) 615-7570
Business Contact
 Prasad Gadgil
Title: PhD
Phone: (408) 615-7570
Research Institution
This Small Business Innovation Research Phase I project proposes to develop a high-speed and flexible prototype Atomic Layer Deposition (ALD) system suitable for its adaptation to an in-situ precursor generation and a plasma source to develop novel Gallium Nitride (GaN) thin film processes for fabrication of high efficiency and High-Brightness Light Emitting Diodes (HBELDs). Recent performance of HBLEDs shows tremendous promise to replace the incandescent light bulb and thereby reduce the electricity consumption by 50%. To realize this dream, however, HBLED production equipment and process chemistry must be suitably advanced for large scale production. In the proposed phase I effort, Atomic Precision will develop a novel prototype thin film processing system capable of developing a low temperature, high deposition rate and low-cost thin film deposition process, with monolayer precision and low defects. When successfully implemented, this novel deposition system and process technology will have broader applications ion other areas, such as low-cost solar cells, industrial hard coatings, metallization and conformal coatings on intricate components.

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government