Novel Reactive Chemical Mechanical Polishing (RCMP) Technology for fabrication of Large, Non-flat SiC mirrors

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: HQ0006-10-C-7341
Agency Tracking Number: B093-024-0518
Amount: $100,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2010
Solicitation Year: 2009
Solicitation Topic Code: MDA09-024
Solicitation Number: 2009.3
Small Business Information
Sinmat Inc
2153 Hawthorne Road, GTEC Center, Suite 129, Box2, Gainesville, FL, 32641
DUNS: 024935517
HUBZone Owned: N
Woman Owned: Y
Socially and Economically Disadvantaged: N
Principal Investigator
 Deepika Singh
 President & CEO
 (352) 334-7237
 singh@sinmat.com
Business Contact
 Deepika Singh
Title: President & CEO
Phone: (352) 334-7237
Email: singh@sinmat.com
Research Institution
N/A
Abstract
Silicon Carbide (SiC) due to its superior thermal and mechanical properties serves as an attractive candidate as mirror material. The manufacturing of such mirrors is a critical challenge because of the hardness and chemical inertness of the material. The current state-of-the-art polishing methods are either typically very slow or introduce a high density of defects, scratches, or large stresses. Sinmat, in collaboration with Penn State University, plans to investigate a novel Reactive Chemical Mechanical Planarization (RCMP) method to rapidly polish non-planar SiC mirrors. This method is expected to be (2X to 10X) faster than conventional methods and has the ability to reduce/eliminate high and mid frequency surface roughness introduced by other methods. In the Phase I of this project, we plan to demonstrate the feasibility of this RCMP process to rapidly polish non-flat SiC mirrors, whereas in Phase II we plan to integrate the process with manufacturing companies, to fabricate large SiC mirrors.

* information listed above is at the time of submission.

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government