Ultra High Temperature Capacitive Pressure Sensor

Award Information
Agency:
National Aeronautics and Space Administration
Branch
n/a
Amount:
$99,984.00
Award Year:
2010
Program:
SBIR
Phase:
Phase I
Contract:
NNX10CC77P
Agency Tracking Number:
094590
Solicitation Year:
n/a
Solicitation Topic Code:
A2
Solicitation Number:
n/a
Small Business Information
Sporian Microsystems, Inc.
515 Courtney Way, Suite B, Lafayette, CO, 80026
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
128688111
Principal Investigator:
Kevin Harsh
Principal Investigator
(303) 516-9075
harshk@sporian.com
Business Contact:
Brian Schaible
President
(303) 516-9075
brian@sporian.com
Research Institution:
n/a
Abstract
To improve the working performance, increase efficiency, reduce cost, and track system health status and failure modes of advanced propulsion systems; miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure, would be highly advantageous. Technical challenges for developing reliable sensing systems lie in extremely harsh working conditions the micro sensors must operate. In addition to high temperatures and pressures, these conditions include oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. High temperature (300-1350oC) capacitive pressure sensors are of particular interest due to their inherent suitability for wireless readout schemes. The objective of this proposed work is to develop a capacitive pressure sensor based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (up to1600

* information listed above is at the time of submission.

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