ELECTRON BEAM IMAGABLE POLYIMIDES

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$191,208.00
Award Year:
1985
Program:
SBIR
Phase:
Phase II
Contract:
n/a
Award Id:
691
Agency Tracking Number:
691
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
P.o. Box Gg, Rte. 5, Northwye, Rolla, MO, 65401
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Dr. Perry Brewer
() -
Business Contact:
() -
Research Institute:
n/a
Abstract
THE FEASIBILITY OF DEVELOPING POLYIMIDE PRECURSORS WHICH CANBE DIRECTLY IMAGED BY ELECTRON-BEAMS WILL BE INVESTIGATED. THESE DIELECTRICS WILL HAVE ALL OF THE ADVANTAGES OF POLYIMIDES, AND SAVE PROCESS STEPS BECAUSE THEY WILL BE DIRECTLY IMAGABLE. INTEGRATED CIRCUIT PROCESS TESTS WHICH INCLUDE THICKNESS AND UNIFORMITY OF COATINGS, ADHESION TESTS, AND THERMAL STABILITY WILL BE PERFORMED. THE SENSITIVITY OF THE POLYIMIDE PRECURSORS TO ELECTRON BEAMS, AND THEIR RESOLUTION WILL BE TESTED. IT IS ANTICIPATED THAT THESE TWO IMPORTANT PROPERTIES WILL BE THE MOST DIFFICULT TO ATTAIN SO PERFORMANCE GOALS HAVE BEEN SET TO DETERMINE FEASIBILITY. GPC, NMR AND IR CHEMICAL ANALYSES WILL BE DONE ON THE MOST PROMISING POLYMERS. BECAUSE THE POLYIMIDE REMAINS ON THE INTEGRATED CIRCUIT ITS ELECTRICAL PROPERTIES MUST MEET CERTAIN REQUIREMENTS. RESISTIVITY WILL BE TESTED. THIS PROPERTY SHOULD ALSO MEET A PERFORMANCE OBJECTIVE FOR THE PROGRAM TO BE FEASIBLE FOR PHASE II FUNDING. THE RESISTIVITY OF E-BEAM EXPOSED POLYIMIDE WILL BE MEASURED ALSO TO ENSURE THAT EXPOSURE DOES NOT ADVERSELY AFFECT ITS PERFORMANCE AS A DIELECTRIC.

* information listed above is at the time of submission.

Agency Micro-sites


SBA logo

Department of Agriculture logo

Department of Commerce logo

Department of Defense logo

Department of Education logo

Department of Energy logo

Department of Health and Human Services logo

Department of Homeland Security logo

Department of Transportation logo

Enviromental Protection Agency logo

National Aeronautics and Space Administration logo

National Science Foundation logo
US Flag An Official Website of the United States Government