PROCESSING

Award Information
Agency:
Department of Defense
Branch
Defense Advanced Research Projects Agency
Amount:
$49,710.00
Award Year:
1986
Program:
SBIR
Phase:
Phase I
Contract:
n/a
Agency Tracking Number:
3739
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Brewer Science Inc
Po Box Gg - 2401 High Tech Dr, Rolla, MO, 65401
Hubzone Owned:
N
Minority Owned:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
DR TERRY BREWER
(314) 364-0300
Business Contact:
() -
Research Institution:
n/a
Abstract
SEMICONDUCTING ORGANIC MATERIALS WILL BE TESTED FOR THEIR PROCESSABILITY IN INTEGRATED CIRCUIT MANUFACTURING. THE MATERIALS TO BE TESTED INCLUDE POLYPHENYLENE, POLYPHTHALOCYANINES, POLYACRYLONITRILES, TETRATHIAFULVENE HALIDES, AND POLYSILASTYRENE. THESE MATERIALS, WHEN PROPERLY DOPED, HAVE GOOD ELECTRICAL CONDUCTIVITIES AS WELL AS MAINTAINING EXCELLENT THERMAL STABILITY OF 400 DEG C. RATHER THAN DEVISING NEW CIRCUITS, THE WORK WILL LOOK AT INCORPORATING THE POLYMER INTO EXISTING STATE OF THE ART SILICON TECHNOLOGY. SPECIAL MODERN METALLIZATION TECHNIQUES AND ION ETCHING TECHNIQUES WILL BE EVALUATED WITH THE POLYMERS. PHASE I WILL ALSO FORM THE POLYMERS AS PARTS OF SIMPLE CAPACITORS AND RESISTORS, AND TEST FOR CONDUCTIVITY AND OHMIC CONTACT. TESTS OF THEIR FILM-FORMING CAPABILITY WILL BE EXAMINED AS WELL AS THE ABILITY TO BE PATTERNED BY PHOTOLITHOGRAPHY OR ELECTRON-BEAM LITHOGRAPHY.

* information listed above is at the time of submission.

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