High Plasma Etch-Resistant Electron Beam Resists for Sub-150mm Applications

Award Information
Agency:
National Science Foundation
Amount:
$99,855.00
Program:
SBIR
Contract:
9860346
Solitcitation Year:
N/A
Solicitation Number:
N/A
Branch:
N/A
Award Year:
1999
Phase:
Phase I
Agency Tracking Number:
9860346
Solicitation Topic Code:
N/A
Small Business Information
Brewer Science Inc
2401 Brewer Drive, Rolla, MO, 65401
Hubzone Owned:
N
Woman Owned:
N
Socially and Economically Disadvantaged:
N
Duns:
N/A
Principal Investigator
 Tony Flaim
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

Agency Micro-sites

US Flag An Official Website of the United States Government