High Plasma Etch-Resistant Electron Beam Resists for Sub-150mm Applications

Award Information
Agency:
National Science Foundation
Branch
n/a
Amount:
$99,855.00
Award Year:
1999
Program:
SBIR
Phase:
Phase I
Contract:
9860346
Agency Tracking Number:
9860346
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
Brewer Science Inc
2401 Brewer Drive, Rolla, MO, 65401
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
n/a
Principal Investigator:
Tony Flaim
() -
Business Contact:
() -
Research Institution:
n/a
Abstract
N/A

* information listed above is at the time of submission.

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