SBIR Phase I: Anti-Reflective Coatings (ARCs) for 193nm Lithography

Award Information
Agency: National Science Foundation
Branch: N/A
Contract: 9561462
Agency Tracking Number: 33678
Amount: $74,998.00
Phase: Phase I
Program: SBIR
Awards Year: 1996
Solitcitation Year: N/A
Solitcitation Topic Code: N/A
Solitcitation Number: N/A
Small Business Information
Brewer Science Inc.
2401 High Tech D, Rolla, MO, 65401
Duns: N/A
Hubzone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Jim Meador
 () -
Business Contact
Phone: () -
Research Institution
N/A
Abstract
N/A

* information listed above is at the time of submission.

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