Improve/develop metrology for VLA (very low absorption) Coatings: Interferometer-less Coherent Optical Topographic Mapping Technique With Sub-Nanomet

Award Information
Agency: Department of Defense
Branch: Missile Defense Agency
Contract: F33615-03-M-5703
Agency Tracking Number: 022-0361
Amount: $70,000.00
Phase: Phase I
Program: SBIR
Awards Year: 2002
Solicitation Year: N/A
Solicitation Topic Code: N/A
Solicitation Number: N/A
Small Business Information
5024 Campbell Blvd.,, Suite E, Baltimore, MD, 21236
DUNS: 064894157
HUBZone Owned: N
Woman Owned: N
Socially and Economically Disadvantaged: N
Principal Investigator
 Chen Chia Wang
 Senior Scientist
 (410) 668-5800
Business Contact
 Diane Murray
Title: Contract Coordinator
Phone: (512) 303-2362
Research Institution
"We present in this proposal an interferometer-less optical topographic mapping technique capable of monitoring, for example, the surface quality of coatings on the optics to be deployed in the ABL program. Unlike crystal monitors that are displaced awayfrom the optic under coating, our proposed remote-sensing technique can directly measure the coating characteristics on the substrate and during the coating/manufacturing processes without pausing and removing the optic out of the coating chamber.Two-dimensional photo-EMF sensor arrays can be developed to monitor the optics surface quality over a wide area, making them especially ideal for diagnosis purposes on large aperture optics used by ABL. Sub-nanosecond response times of the proposedphoto-EMF sensors allow near-instantaneous determination of coating quality which can be used to provide real-time feedback to the coating processes. Successful execution of this proposed program will lead to novel technologies capable of high precision determination of coating thickness and surface flatness. Potential commercial applications range from semiconductor chip fabrication, magnetic diskquality control, mask-less photolithography, as well as optical fiber dispersion characterization for the telecomm industries."

* Information listed above is at the time of submission. *

Agency Micro-sites

SBA logo
Department of Agriculture logo
Department of Commerce logo
Department of Defense logo
Department of Education logo
Department of Energy logo
Department of Health and Human Services logo
Department of Homeland Security logo
Department of Transportation logo
Environmental Protection Agency logo
National Aeronautics and Space Administration logo
National Science Foundation logo
US Flag An Official Website of the United States Government