Development of large bulk Silicon Carbide substrates from halogenated precursors

Award Information
Agency:
Department of Defense
Branch
Navy
Amount:
$460,370.00
Award Year:
2005
Program:
SBIR
Phase:
Phase II
Contract:
N00014-05-C-0374
Agency Tracking Number:
N042-177-0511
Solicitation Year:
n/a
Solicitation Topic Code:
n/a
Solicitation Number:
n/a
Small Business Information
CARACAL, INC.
611 Eljer Way, Ford City, PA, 16226
Hubzone Owned:
N
Socially and Economically Disadvantaged:
N
Woman Owned:
N
Duns:
147973353
Principal Investigator:
Olle Kordina
Vice President
(724) 763-2111
olle@caracalsemi.com
Business Contact:
Rajiv Enand
CEO
(724) 763-2111
rajiv@caracalsemi.com
Research Institution:
n/a
Abstract
The development of long SiC boules grown from the gas-phase using chlorinated halo-hydrocarbons faces enormous technical hurdles that must be overcome. The hurdles of specific interest are the outlet, the materials degradation, and the inlet. Caracal proposes to find a solution to all of the above mentioned technical obstacles. The outlet is of particular importance since it limits the length of the boules to 2 - 5 mm. Caracal suggests an outlet which can keep a free path for the gas for prolonged growth yielding longer crystals. The inlet needs more development in order to handle the long growth times required. The graphite materials and insulation has historically caused drift in the system due to reactions with silicon vapor and hydrogen. Caracal proposes new crucible material that can withstand these attacks much better.

* information listed above is at the time of submission.

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